Packing Tool mPT 150 / 200f

The Packing Tool mPT 150 / 200f is a high - performance machine designed for fully automated transfer of 150mm（6"）and 200mm（8"）wafers on film frames between cassettes and shipping boxes for packing and unpacking.

The mPT 150 / 200f comes with two independent cassette ports for 6" / 8" wafers on film frames，a single - arm - robot，customized frame end - effectors 6" /8" and a packing module containing six stations for shipping boxes and packing material，as well as a touch screen.Optionally it can be equipped with an ionizer.

Features

• Film frame sizes：for 150mm（6"）and 200mm（8"）wafers
• Packing and unpacking of film frames
• Optimized footprint
• High throughput
• Customized movement programming to achieve a maximum output
• Ionizer optional
• barcode reader for frame ID optional
• FFU for better cleanroom class optional
• Cleanroom class 6（ISO EN 14 644 - 1）
• CE certificated
• SEMI standards compliant
• UPS（uninterruptible power supply）optional