Wafer Sorter mWS 150 / 200

The Wafer Sorter mWS 150 / 200 is designed for sorting，（mass）transfering，splitting or merging of 150mm（6”）and 200mm（8”）thin and warped wafers in one machine and can be equipped with up to six cassettes.The mWS 150 / 200 continuously monitors all wafers in the cassette before and during the whole work process and verifies the compatibility of wafer and end - effector size.

The mWS 150 / 200 comes with two scanners（each for up to three cassettes），a dual - arm - robot，Bernoulli vacuum end - effectors，a pre - aligner and an automated end - effector change station，as well as an end - effector cleaner.Optionally it can be equipped with other end - effectors（e.g. Top Grip or Batch）and a green light visual inspection module.