Wafer Loader mWL 300

The Wafer Loader mWL 300 is designed for fully automated loading and unloading of 300mm（12"）standard wafers or e.g.eWLB wafers from FOUPs / FOSBs onto an external chuck.

The mWL 300 comes with two load ports，a single - arm - robot on a linear track and an appropriate end - effector. Optional it can be equipped with a pre - aligner，a customized external chuck and a RFID reader for FOUP / FOSB detection，as well as with a 200mm（8"）conversion - kit.

The adaptation to OEM tools according to customer requirements is possible.

Features

• Wafer size：300mm（12"）or optional 200mm（8"）
• Loading and unloading of a chuck
• Handling of standard - or e.g.eWLB wafers
• Handling of warped wafers
• Optimized footprint
• Standard FOUP or FOSB compliant
• 200mm（8") conversion kit optional
• RFID reader for FOUP - / FOSB - ID optional
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 5（ISO EN 14 644 - 1）
• CE certificated
• SEMI standards compliant
• UPS（uninterruptible power supply）optional

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