Nikon OST3100 /12" Wafer Inspection .The OST3100 is suitable for bumping house ,testing house,OQA department.Thanks for multi-function design and customers' co-work
The OST3100 is suitable for bumping house,testing house,OQA department.Thanks for multi - function design and customers' co - work.
• Available for 8" and 12" wafer inspection. • Enable bending wafer and Thin wafer macro and micro inspection. • High resolution wafer surface and backside macro capture function. • KLARF file review software is available. • IDM software enable to testing process for good die and bad die inspection. • FOUP / FOSB handle. • Auto focus and motorized stage. • Large area and high brightness macro illuminator.