Nikon NWL - 200 / 8" 6" Wafer Inspection  

• Available for 5""，6""，8"" wafer inspection by different recipe（5"" Option）.
• Edge - chipping detection With high - precision automatic detection，edge defects that cause wafer cracking can be removed promptly（Option）from its slot with a single button.
•  3 kind macro inspection：wafer surface，wafer backside center and wafer backside periphery.
• The new WIL - LED illumination system enables more uniform illumination over a wider area C.O.O. almost zero.
• High reliability Should an error occur，an error message is displayed on the LCD panel.Even when the power is turned off，the vacuum chuck of the macro inspection mechanism stays on.If a problem occurs，wafers on the loader can be returned to the carrier without the use of tweezers.