Packing Tool mPT 150 / 200

The Packing Tool mPT 150 / 200 is designed for packing and unpacking of 150mm（6”）and 200mm（8”）wafers by using contactless end - effectors（mCL series）.

The mPT 150 / 200 comes with a dual - arm - robot，contactless end - effectors for 6" / 8" wafers，wafer flipping function，two cassette stations with scanner for 6" / 8" cassettes，a pre - aligner，a packing chuck and a packing module containing five stations for shipping boxes and packing material，as well as a touch screen.Optionally it can be equipped with a green light visual inspection module.

Features

• Wafer sizes：150mm（6”）and 200mm（8”）
• Packing and unpacking of e.g.thin - wafers
• Handling of warped wafers
• Optimized footprint
• High throughput
• Cassette scanning
• Green light visual inspection optional
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 6（ISO EN 14 644 - 1）
• CE certificated
• SEMI standard compliant
• UPS（uninterruptible power supply）optional