OPTISTATION V 8 ” WAFER 自動晶片檢查站

‧  APPLICATION FOR ADI/AEI/AFI/ASI
‧  ‧  ADI ： Inspection after Developing
‧  ‧ AEI ： Inspection after Etching
‧  ‧ AFI ： Inspection after Furnace 
‧  ‧ AS I ： Inspection after Sputtering 
‧  Resolution:0.18 μ m 
‧  INDEXER(OPTION) 
‧  GEM/SECS II(OPTION) 
‧  MICRO/MACRO/BACK-SIDE MACRO INSPECTION AVAILABLE 
‧  NON-CONTACT PRE-ALIGN
‧  ERGONOMIC DESIGN